Automatic optical device for roughness measurement based on differential scattering

Valentina V. Azarova; Natalija M. Solovjeva

doi:10.1117/12.155654

24 September 1993 Automatic optical device for roughness measurement based on differential scattering

Valentina V. Azarova, Natalija M. Solovjeva

Proceedings Volume 1711, High-Performance Optical Spectrometry; (1993) https://doi.org/10.1117/12.155654
Event: High Performance Optical Spectrometry, 1992, Warsaw, Poland

Abstract

The automatic measuring device for the control of technology and for polishing surface roughness measurements has been described in this work. This device has very high sensibility and allows to measure rms ( root mean squared ) roughness U equal some angstroms. There is noncontactive and nondestructive photometric measurement. It is based on the differential scattering measurement. We develop the theoretical framework for the device to definite absolute quantity rms roughness a and correlation length a. It has been demonstrated that this device together with method allows to measure surface roughness of samples from different materials including transparent ones for laser light. It was foreseen that the scattering from the untest surface of sample would be led out. It allowed to measure the transparent samples without sputtering reflective films. Sensibility of defination of rms roughness is about 1 A, with precision about 30%. The results of this measuring method were compared with ones obtained with other methods and it was received good agreement. The results of the investigation of the surface samples roughness with different technology has been described. This method of measurement has an industrial application for control different surfaces roughness.

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Valentina V. Azarova and Natalija M. Solovjeva "Automatic optical device for roughness measurement based on differential scattering", Proc. SPIE 1711, High-Performance Optical Spectrometry, (24 September 1993); https://doi.org/10.1117/12.155654

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KEYWORDS

Light scattering

Scattering

Error analysis

Control systems

Laser scattering

Scatter measurement

Surface roughness

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