Soft x-ray polarization measurement with a laboratory reflectometer

Masaki Yamamoto; Kou Mayama; Hiroshi Nomura; Hiroaki Kimura; Mihiro Yanagihara; Takeshi Namioka

doi:10.1117/12.132146

20 October 1992 Soft x-ray polarization measurement with a laboratory reflectometer

Masaki Yamamoto, Kou Mayama, Hiroshi Nomura, Hiroaki Kimura, Mihiro Yanagihara, Takeshi Namioka

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132146
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A laboratory reflectometer with a laser produced plasma source and a constant deviation angle monochromator is used as an ellipsometer to evaluate a transmission multilayer phase shifter. With use of the phase shifter, all normalized Stokes parameters of the incident beam to the reflectometer from the monochromator were measured.

Citation Download Citation

Masaki Yamamoto, Kou Mayama, Hiroshi Nomura, Hiroaki Kimura, Mihiro Yanagihara, and Takeshi Namioka "Soft x-ray polarization measurement with a laboratory reflectometer", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132146

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