Mueller matrix measurements with an out-of-plane polarimetric scatterometer

Tod F. Schiff; John C. Stover; Donald R. Bjork; B. D. Swimley; Daniel J. Wilson; Mark E. Southwood

doi:10.1117/12.138799

11 December 1992 Mueller matrix measurements with an out-of-plane polarimetric scatterometer

Tod F. Schiff, John C. Stover, Donald R. Bjork, B. D. Swimley, Daniel J. Wilson, Mark E. Southwood

Proceedings Volume 1746, Polarization Analysis and Measurement; (1992) https://doi.org/10.1117/12.138799
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

This paper reviews a scatterometer capable of measuring scatter throughout most of the sphere surrounding the sample. The instrument can be configured to operate at many different laser wavelengths, or with a broadband source, and at virtually any angle of incidence. Automated polarization control of both source and receiver has been accomplished, which allows calculation of incident and scattered Stokes vectors as well as the Mueller matrix associated with either reflective or transmissive samples. A unique 'no sample' method of instrument calibration and Mueller matrix calculation results in a normalized Mueller noise floor of only +/- 0.003.

Citation Download Citation

Tod F. Schiff, John C. Stover, Donald R. Bjork, B. D. Swimley, Daniel J. Wilson, and Mark E. Southwood "Mueller matrix measurements with an out-of-plane polarimetric scatterometer", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); https://doi.org/10.1117/12.138799

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