ISO figure specification (ISO-10110-5) and digital interferometry

Lars A. Selberg; Bruce E. Truax

doi:10.1117/12.139230

15 December 1992 ISO figure specification (ISO-10110-5) and digital interferometry

Lars A. Selberg, Bruce E. Truax

Proceedings Volume 1776, Interferometry: Surface Characterization and Testing; (1992) https://doi.org/10.1117/12.139230
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

The ISO standard for optical drawing specification (ISO 10110) includes a part on surface form tolerances (figure error). Standardization of this specification provides a succinct and readily understood nomenclature which will be useful in industry, especially as it is intended to unify visual and digital evaluation. It is a peculiar standard in that it does not control surface form directly, but controls it by its effect in a particular test, interferometric comparison with a 'perfect' reference. The application of this standard to digital interferometry is discussed, including a review of the mechanics of this standard and some examples. ISO 10110-5 is vague on some points and these are discussed. These issues include spatial frequency sampling, specific algorithms for calculating some of these tolerances, measurement accuracy concerns, aspherics and guidelines for determining if digital interferometry is required.

Citation Download Citation

Lars A. Selberg and Bruce E. Truax "ISO figure specification (ISO-10110-5) and digital interferometry", Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); https://doi.org/10.1117/12.139230

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