Laser technologies for micro-optics fabrication

Vadim P. Veiko; Alexei K. Kromin; Evgeny B. Yakovlev

doi:10.1117/12.148050

15 July 1993 Laser technologies for micro-optics fabrication

Vadim P. Veiko, Alexei K. Kromin, Evgeny B. Yakovlev

Proceedings Volume 1874, Infrared and Millimeter-Wave Engineering; (1993) https://doi.org/10.1117/12.148050
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

Here we try to summarize modern views on physical essence and technical opportunities of different laser technologies for MOC fabrication. This paper based previously on our own investigations made at the Laser Technologies Chair of IFMO, St. Petersburg and sometimes on the experience of other authors.

Citation Download Citation

Vadim P. Veiko, Alexei K. Kromin, and Evgeny B. Yakovlev "Laser technologies for micro-optics fabrication", Proc. SPIE 1874, Infrared and Millimeter-Wave Engineering, (15 July 1993); https://doi.org/10.1117/12.148050

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available