Optical system design of the Voltage ImagingTM optical subsystem (VIOS) in AMLCD in-process test system (IPT)

Ying-Moh Liu; David Yushan Fong

doi:10.1117/12.163650

25 November 1993 Optical system design of the Voltage Imaging^TM optical subsystem (VIOS) in AMLCD in-process test system (IPT)

Ying-Moh Liu, David Yushan Fong

Author Affiliations +

Proceedings Volume 2000, Current Developments in Optical Design and Optical Engineering III; (1993) https://doi.org/10.1117/12.163650
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Photon Dynamics' IPT system provides high throughput and excellent voltage measurement sensitivity on an AMLCD panel. It is based upon an electro-optical technology to measure the voltage stores on an LCD pixel of an AMLCD active plate. This paper discusses the system performance requirements. From these we derive the optical subsystem requirements. The optical design form and its performance are presented. The current system status, system design issues, and the future improvements also are discussed.

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Ying-Moh Liu and David Yushan Fong "Optical system design of the Voltage Imaging^TM optical subsystem (VIOS) in AMLCD in-process test system (IPT)", Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); https://doi.org/10.1117/12.163650

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