Statistical theory for quasi-heterodyne ESPI with reference beam

Wen Zheng

doi:10.1117/12.165483

10 December 1993 Statistical theory for quasi-heterodyne ESPI with reference beam

Wen Zheng

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165483
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This paper presents a general and meaningful description to the mechanism of quasi- heterodyne ESPI with smooth or speckled reference beam using statistical optical theory. The statistical distribution of metrological fields is derived. The limitations of transverse component of the object displacement to the fringe contrast and valid signal value of phase detection are discussed.

Citation Download Citation

Wen Zheng "Statistical theory for quasi-heterodyne ESPI with reference beam", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165483

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