Flexible measuring machine based on a double interferometer

Umberto Minoni; Franco Docchio; Silvano Biazzi; Pietro Brusaferri; Giovanni Scotti

doi:10.1117/12.162102

22 October 1993 Flexible measuring machine based on a double interferometer

Umberto Minoni, Franco Docchio, Silvano Biazzi, Pietro Brusaferri, Giovanni Scotti

Proceedings Volume 2066, Industrial Optical Sensing and Metrology: Applications and Integration; (1993) https://doi.org/10.1117/12.162102
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

In this work a prototype of a flexible electro-optical measuring machine suitable for dimensional quality control of inner and outer diameters of mechanical workpieces, is presented. Two measuring probes are displaced by means of motorized slides over a range of +/- 100 mm enabling the measurement of diameters from 0 up to 200 mm. The position of the probes is gauged by a double interferometer designed for the application. The characterization of the prototype has shown that repeatability and accuracy are better than +/- 0.16 micrometers .

Citation Download Citation

Umberto Minoni, Franco Docchio, Silvano Biazzi, Pietro Brusaferri, and Giovanni Scotti "Flexible measuring machine based on a double interferometer", Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); https://doi.org/10.1117/12.162102

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