Process control for 0.25 um GaAs microwave monolithic integrated circuits

Rick D. Hudgens; Shirley Meyers; Bret A. Small; Keith Salzman; David Rhine; Randy Class

doi:10.1117/12.174130

1 May 1994 Process control for 0.25 um GaAs microwave monolithic integrated circuits

Rick D. Hudgens, Shirley Meyers, Bret A. Small, Keith Salzman, David Rhine, Randy Class

Proceedings Volume 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII; (1994) https://doi.org/10.1117/12.174130
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Gallium arsenide metal semiconductor field effect transistors (GaAs MESFETs) are used in analog microwave monolithic integrated circuits (MMICs) because of their high frequency response. Common applications for MMICs include low noise and power amplifiers for use in satellite communication and missile guidance systems. The performance of MESFETs is improved with smaller gate lengths, but to consistently achieve the highest performance, control methods must be in place for the critical processes. Gate length control is the key parameter in maintaining the rf performance and a lack of gate pinch off is the major yield loss category. This paper describes the process and the tools that Texas Instruments uses to monitor the critical parameters. It also describes the control methods and reviews the major contributors to variations in the process.

Citation Download Citation

Rick D. Hudgens, Shirley Meyers, Bret A. Small, Keith Salzman, David Rhine, and Randy Class "Process control for 0.25 um GaAs microwave monolithic integrated circuits", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); https://doi.org/10.1117/12.174130

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available