Surface profiling by frequency-domain analysis of white light interferograms

Peter J. de Groot; Leslie L. Deck

doi:10.1117/12.194308

15 November 1994 Surface profiling by frequency-domain analysis of white light interferograms

Peter J. de Groot, Leslie L. Deck

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194308
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

Three-dimensional imaging interferometric microscopes have outstanding accuracy, provided of course that the test objects are sufficiently smooth and continuous. The present study shows that a white-light source and spatial-frequency domain analysis of the resulting interferograms can dramatically increase the range of application of interferometric surface profilers. This analysis breaks the white light up into its constituent colors and makes it possible to apply multiple-wavelength techniques to the problem of surface height measurement.

Citation Download Citation

Peter J. de Groot and Leslie L. Deck "Surface profiling by frequency-domain analysis of white light interferograms", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194308

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