Investigation of ch-plasma with using of microwave spectrometer

A. D. Akhsakhaljan

doi:10.1117/12.2303041

1 January 1994 Investigation of ch-plasma with using of microwave spectrometer

A. D. Akhsakhaljan

Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 22500O (1994) https://doi.org/10.1117/12.2303041
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States

Abstract

The microwave spectrometer on coherence spontaneous radiation effect (CSR Ã¢â‚¬â€ spectrometer) in millimeter wavelength range was used for analysis of diamond films deposition products. Investigation of dynamic characteristics CH Ã¢â‚¬â€ plasma components in reactor in situ was realized.

Citation Download Citation

A. D. Akhsakhaljan "Investigation of ch-plasma with using of microwave spectrometer", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 22500O (1 January 1994); https://doi.org/10.1117/12.2303041

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