Soft x-ray detection efficiency of large-area avalanche photodiodes

Eric M. Gullikson; Ernesto V. Gramsch; Marek Szawlowski

doi:10.1117/12.193184

7 November 1994 Soft x-ray detection efficiency of large-area avalanche photodiodes

Eric M. Gullikson, Ernesto V. Gramsch, Marek Szawlowski

Proceedings Volume 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry; (1994) https://doi.org/10.1117/12.193184
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The efficiency of beveled edge type avalanche photodiodes has been determined for soft x rays in the range 50 eV to 300 eV. An efficiency of over 80% is measured for energies below the Si L absorption edge at 100 eV. The measured efficiency is described by a model which accounts for absorption in an oxide overlayer and recombination at the front surface of the diode. These results are very encouraging for soft x-ray/EUV applications involving both laser-produced plasma sources and synchrotron radiation.

Citation Download Citation

Eric M. Gullikson, Ernesto V. Gramsch, and Marek Szawlowski "Soft x-ray detection efficiency of large-area avalanche photodiodes", Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); https://doi.org/10.1117/12.193184

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