Paper
25 February 1981 Improved Holography For Chirped Waveguide Diffraction Gratings
D. A. Bryan, J. K. Powers
Author Affiliations +
Abstract
Diffraction gratings on planar waveguides have been improved by removing holographic causes of unwanted scattering of guided waves and by increasing the grating depth to obtain greater diffraction efficiency. Viewing the gratings as holograms of the exposure system permitted identifying and removing offending components such as collimating lenses. Reducing the standing wave pattern in the film during exposure permitted greater groove depth in the resulting grating.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. A. Bryan and J. K. Powers "Improved Holography For Chirped Waveguide Diffraction Gratings", Proc. SPIE 0239, Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications, (25 February 1981); https://doi.org/10.1117/12.959195
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KEYWORDS
Diffraction gratings

Photoresist materials

Waveguides

Diffraction

Reflection

Scattering

Holography

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