Multilayer x-ray optics with enhanced thermal and radiation stability

Anatoli I. Fedorenko; V. V. Kondratenko; E. A. Bugaev; Yurii P. Pershin; A. G. Ponomarenko; O. V. Poltseva; I. A. Kopylets; S. A. Yulin; E. N. Zubarev

doi:10.1117/12.212589

20 June 1995 Multilayer x-ray optics with enhanced thermal and radiation stability

Anatoli I. Fedorenko, V. V. Kondratenko, E. A. Bugaev, Yurii P. Pershin, A. G. Ponomarenko, O. V. Poltseva, I. A. Kopylets, S. A. Yulin, E. N. Zubarev

Author Affiliations +

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212589
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Thermal stability of structure, period and x-ray reflectivity of multilayer mirrors for the whole range of soft x rays with wavelengths 1 - 30 nm were studied in wide temperature range 350 - 1400 K by x-ray scattering and cross-sectional electron microscopy methods. Irradiation by He⁺ particles with energy 30 keV and doses 1 multiplied by 10¹⁹ -4 multiplied by 10²⁰ ion/m² and by 10 MeV-electrons with dose up to 10^-4 Gray was carried out for evaluation of radiation stability of Mo/Si and MoSi₂Si multilayer mirrors. It was shown that thermodynamic equilibrium of layer materials at their interfaces and stabilization of layer structure by impurities and heat treatment are an effective approach to multilayer x-ray optics with enhanced thermal and radiation stability.

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Anatoli I. Fedorenko, V. V. Kondratenko, E. A. Bugaev, Yurii P. Pershin, A. G. Ponomarenko, O. V. Poltseva, I. A. Kopylets, S. A. Yulin, and E. N. Zubarev "Multilayer x-ray optics with enhanced thermal and radiation stability", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212589

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