Quality assessment of engineering surfaces by infrared scattering

Mans Bjuggren; Laurent Krummenacher; Lars H. Mattsson

doi:10.1117/12.218439

8 September 1995 Quality assessment of engineering surfaces by infrared scattering

Mans Bjuggren, Laurent Krummenacher, Lars H. Mattsson

Proceedings Volume 2536, Optical Manufacturing and Testing; (1995) https://doi.org/10.1117/12.218439
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The prevailing technique for assessing surface roughness and related parameters from engineering surfaces in industry is mechanical stylus profilometry. Though it is a conceptually direct method it suffers from several drawbacks; the measurement is not area-covering while many important features of engineering surfaces are related to 3D topography; the technique is slow; and, the technique involves contact with the surface, potentially damaging it. For surfaces of optical quality, elastic light scattering provides an efficient way of characterizing surfaces, and two ASTM standards exist pertaining to such measurements. However, the theoretical models based on first order perturbation theory break down when the rms roughness approaches one tenth of the incident wavelength. We have used infrared scattering at 10.6 micrometers wavelength to provide area-covering, non-contact surface characterization of engineering surfaces. The surface power spectral density is calculated from the scattering distribution by Rayleigh-Rice vector perturbation theory. Measurement of bandwidth limited surface roughness is demonstrated for ground and polished surfaces in the root mean square roughness range of 0.03 micrometers to 1.7 micrometers . Good correlation with contact stylus measurements is achieved for nearly 1D surfaces, anisotropic surfaces, and isotropic surfaces. Measurement of scratch and lay characteristics are also demonstrated.

Citation Download Citation

Mans Bjuggren, Laurent Krummenacher, and Lars H. Mattsson "Quality assessment of engineering surfaces by infrared scattering", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); https://doi.org/10.1117/12.218439

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