Optical approach for LCD inspection

Shigeki Terada; Yasuo Shono

doi:10.1117/12.215582

2 August 1995 Optical approach for LCD inspection

Shigeki Terada, Yasuo Shono

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215582
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

Optical inspection technology is very fundamental for TFT (thin film transistor) array and cell processes of the LCD (liquid crystal display) manufacturing which is utilized in IQC (in-line quality control) process. This paper describes a general overview about LCD inspection items and our requirements, and show some optical technology for those inspection items.

Citation Download Citation

Shigeki Terada and Yasuo Shono "Optical approach for LCD inspection", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215582

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