Hollow glass waveguides with CVD-deposited metal and dielectric coatings

Yuji Matsuura; James A. Harrington

doi:10.1117/12.237567

5 April 1996 Hollow glass waveguides with CVD-deposited metal and dielectric coatings

Yuji Matsuura, James A. Harrington

Proceedings Volume 2677, Biomedical Fiber Optics; (1996) https://doi.org/10.1117/12.237567
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Hollow glass waveguides have been fabricated for the delivery of infrared radiation by chemical vapor deposition methods. A molybdenum film is first deposited inside 700- micrometer and 530-micrometer bore silica tubing by the hydrogen reduction of molybdenum chloride. Then, Al₂O₃, or TiO₂ film is deposited onto the molybdenum layer. These dielectric films enhance the reflectivity, and we observe a reduction in loss for the thin- film combination compared with the molybdenum film alone. The thickness uniformity of the dielectric films is estimated to be less than 5% of the desired thickness in a length of 50 cm. A loss spectrum of the Al₂O₃/Mo-coated waveguides shows that the losses for the Al₂O₃ guide in the 3 - 6 micrometer wavelength region are lower than the loss for the AgI-coated guide fabricated by liquid-phase deposition technique. The chemical vapor deposition techniques can be extended to the fabrication of hollow waveguides with multiple dielectric layers that have much lower losses than current single-layer designs.

Citation Download Citation

Yuji Matsuura and James A. Harrington "Hollow glass waveguides with CVD-deposited metal and dielectric coatings", Proc. SPIE 2677, Biomedical Fiber Optics, (5 April 1996); https://doi.org/10.1117/12.237567

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