Ion-assisted deposition of optical coatings

Zhengxiu Fan; Rui-Ying Fan; Xuefei Tang

doi:10.1117/12.240422

27 May 1996 Ion-assisted deposition of optical coatings

Zhengxiu Fan, Rui-Ying Fan, Xuefei Tang

Proceedings Volume 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995; (1996) https://doi.org/10.1117/12.240422
Event: Laser-Induced Damage in Optical Materials: 1995, 1995, Boulder, CO, United States

Abstract

Ion assisted deposition technique and effects of this technique on properties of optical coatings are investigated in this paper. We have produced thin-film samples by bombarding with different ions such as oxygen, argon and mixture of the two during deposition, of which the refractive index, the extinctive coefficient and the laser induced damage threshold are analyzed in detail.

Citation Download Citation

Zhengxiu Fan, Rui-Ying Fan, and Xuefei Tang "Ion-assisted deposition of optical coatings", Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); https://doi.org/10.1117/12.240422

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available