Microscale structure fabrication using microprobe

Norio Shinya; Takeshi Konno; Mitsuru Egashira

doi:10.1117/12.240457

20 May 1996 Microscale structure fabrication using microprobe

Norio Shinya, Takeshi Konno, Mitsuru Egashira

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240457
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

Using a tungsten micro-probe with a tip of 2 micrometers radius, fine metallic powder particles could be manipulated one by one. By applying low voltage (about 10 V) between the probe and a metallic substrate, the powder particle on the substrate was adsorbed to the tip of probe easily, and by cutting off the voltage the powder particle was desorbed from the tip. Therefore it is possible to arrange powder particles as designed by controlling the voltage and movement of the probe. In addition to the powder particle manipulation, powder particles welding was studied. The tungsten micro-probe was contacted with the powder particle on the metallic substrate, and high voltage (about 10 kV) was applied between the probe and the substrate. It was observed that the glow discharge was caused between the powder particle and the substrate. The contacting parts of the powder particle and the substrate were melted and welded each other. By the manipulation and the welding, micro-structures composed of fine powder particles (about 60 micrometers ) were constructed. Powder particle towers and a micro- actuator were fabricated by way of trial. The results demonstrated the potential of the micro- probe assembly for the fabrication of electronic devices, micromachines and intelligent materials.

Citation Download Citation

Norio Shinya, Takeshi Konno, and Mitsuru Egashira "Microscale structure fabrication using microprobe", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240457

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available