Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods

Stephan Pichlmaier; Karl Hehl; Uwe Schuhmann; Stefan Gliech; Angela Duparre

doi:10.1117/12.246757

19 August 1996 Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods

Stephan Pichlmaier, Karl Hehl, Uwe Schuhmann, Stefan Gliech, Angela Duparre

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246757
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

We investigated thin MgF₂/LaF₃- and LaF₃/MgF₂-layers on opaque glass with angle resolved light scattering to analyze the different scattering contributions. We already showed the possibility of separating the volume scattering from the interface contribution for a single MgF₂-layer on BK7. In this work we concentrated on layers with thicknesses common for multilayer mirrors in the UV. The roughness of the interfaces was included in the calculations by the power spectral density measured with the atomic force microscope. This has proven to be better than a Gaussian or exponential correlation function ansatz. In order to obtain as much information as possible we also investigated the uncoated substrates and the corresponding single layer systems. We found again that the investigated layers, which have columnar structure, showed generally non-negligible volume scattering. Additionally crosscorrelation between the different interfaces must be taken into consideration.

Citation Download Citation

Stephan Pichlmaier, Karl Hehl, Uwe Schuhmann, Stefan Gliech, and Angela Duparre "Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246757

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available