High resolution 3D laser interferometer with reduced linearity error

Bernhard Hils

doi:10.1117/12.2299034

1 September 1996 High resolution 3D laser interferometer with reduced linearity error

Bernhard Hils

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 277848 (1996) https://doi.org/10.1117/12.2299034
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

We describe an interferometer-system for simultaneously displacement and tilt measurement that satisfies present need of high accuracy and high resolution in the sub-nm and sub aresecond range. This accuracy mainly requires the determination and correction of three major error sources in optical interferometry: Abbe offset error, changes of the refractive index of air and cyclic errors in phase detection.

Citation Download Citation

Bernhard Hils "High resolution 3D laser interferometer with reduced linearity error", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277848 (1 September 1996); https://doi.org/10.1117/12.2299034

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