Magnification and object size dependent resolution behavior of the axially symmetric aspherized four-mirror system at soft x-ray wavelength

Cheon Seog Rim

doi:10.1117/12.2316277

1 September 1996 Magnification and object size dependent resolution behavior of the axially symmetric aspherized four-mirror system at soft x-ray wavelength

Cheon Seog Rim

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778GC (1996) https://doi.org/10.1117/12.2316277
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A research is conducted on the axially symmetric four-mirror system for soft X-ray (λ=13nm) projection lithography. As the four-spherical mirror system has 8 design-parameters (4 curvatures and 4 distances), but having 7 constraints¹ from nearly zero third-order aberrations² (Σ_j^V_=I∣S_j∣<10^-6), a given reduction magnification, and scaling factor(c₁=-1), the number of the remaining free design-parameter is one, for instance, d₀ (the distance of object to the first mirror surface) in this work.

Citation Download Citation

Cheon Seog Rim "Magnification and object size dependent resolution behavior of the axially symmetric aspherized four-mirror system at soft x-ray wavelength", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778GC (1 September 1996); https://doi.org/10.1117/12.2316277

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available