Active stabilization and real-time analysis of interference fringes

Ichirou Yamaguchi; Jiyuan Liu; Toshinori Nakajima; Jun-ichi Kato

doi:10.1117/12.250763

18 September 1996 Active stabilization and real-time analysis of interference fringes

Ichirou Yamaguchi, Jiyuan Liu, Toshinori Nakajima, Jun-ichi Kato

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250763
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

An active two-beam interferometer has been developed which locks fringes in the presence of external perturbations such as vibration and air flow and enables measurement on an unstabilized table. Movement of carriered fringes caused by the perturbations are detected by a spatial filtering detector whose output signal is fed back to injection current of a laser diode to compensate for path variations by the resulting wavelength shift. The video image of the fringes is supplied to a real time fringe analyzer which delivers the phase distribution at the video rate. The analyzer is based on electronic moire principle for simultaneous generation of three phase shifted fringe patterns. The results from a spherical mirror of 130 mm- diameter have shown good coincidence in spherical errors with that obtained from measurement on an optical bench. Only its repeatability proved to be worse by 1.7 times.

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Ichirou Yamaguchi, Jiyuan Liu, Toshinori Nakajima, and Jun-ichi Kato "Active stabilization and real-time analysis of interference fringes", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250763

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KEYWORDS

Fringe analysis

Signal detection

Spherical lenses

Video

Interferometers

Moire patterns

Phase shifts

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