Common path interferometric microellipsometry

Yueai Liu; Chung Wah See; Michael G. Somekh

doi:10.1117/12.250794

18 September 1996 Common path interferometric microellipsometry

Yueai Liu, Chung Wah See, Michael G. Somekh

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250794
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Common path interferometric microellipsometry based on the Young's interference principle is presented. Interference of the pure p and s reflections at the back focal plane of a microscopic objective takes place by means of Young's interferometry. Therefore, the amplitude ratio, tan (psi) , and the phase different, (Delta) , of the two polarization components are represented as the contrast and the phase shift of the Young's fringe pattern. Hence, the complex refractive index of the sample can be calculated using well- known equations. This technique is particularly applicable in pure topography where the measured optical phase is actually a contribution of both the surface height change and material change as well.

Citation Download Citation

Yueai Liu, Chung Wah See, and Michael G. Somekh "Common path interferometric microellipsometry", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250794

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