Micro-optics for sensor applications

Philippe Nussbaum; Reinhard Voelkel; Hans Peter Herzig; Rene Daendliker

doi:10.1117/12.248510

26 August 1996 Micro-optics for sensor applications

Philippe Nussbaum, Reinhard Voelkel, Hans Peter Herzig, Rene Daendliker

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248510
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Our investigation is focused on microlens arrays for microsystems and sensor applications. Arrays of refractive lenses (2 micrometer to 5 mm lens diameter) have been fabricated by melting resist technology. Microlens arrays have been transferred in fused silica (reactive ion etching) and replicated in polycarbonate and polymer (embossing, casting). Lens arrays have been integrated into lithographic systems, sensors and neural networks.

Citation Download Citation

Philippe Nussbaum, Reinhard Voelkel, Hans Peter Herzig, and Rene Daendliker "Micro-optics for sensor applications", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248510

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