MBE growth of low-threshold-current InGaAs VCSEL structure

Yaowang Lin; Zengqi Zhou; Zhongqi Pan; Zhichuan Niu; Chao Yong Li; Rong Han Wu

doi:10.1117/12.251905

24 September 1996 MBE growth of low-threshold-current InGaAs VCSEL structure

Yaowang Lin, Zengqi Zhou, Zhongqi Pan, Zhichuan Niu, Chao Yong Li, Rong Han Wu

Proceedings Volume 2886, Semiconductor Lasers II; (1996) https://doi.org/10.1117/12.251905
Event: Photonics China '96, 1996, Beijing, China

Abstract

The structures of InGaAs/GaAs strained QW vertical cavity suurface-emitting lasers with low threshold current have been grown on tilted substrate by a modificatoy MBE system. The VCSEL structure contains 23.5 pairs n-type DBR , a strained InGaAs/GaAs 3QW active region ,and 20.5 pairs p-type DBR. The emission wavelength of InxGaixAs IGaAs QW lasers as a function of indium contents (x) and QW width has been studied theoretically and experimentally. The experimental results compared with theoretical calcuulation were in good agreement. The device measurements showed that room temperature CW operation of VCSEL has been achieved with the threshold current as low as 0.7 mA at 9430 A wavelength, and quantum efficiency above 12%.

Citation Download Citation

Yaowang Lin, Zengqi Zhou, Zhongqi Pan, Zhichuan Niu, Chao Yong Li, and Rong Han Wu "MBE growth of low-threshold-current InGaAs VCSEL structure", Proc. SPIE 2886, Semiconductor Lasers II, (24 September 1996); https://doi.org/10.1117/12.251905

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available