Heterodyne interferometry with surface selectivity and fast response

Junjiang Zhang

doi:10.1117/12.253030

3 October 1996 Heterodyne interferometry with surface selectivity and fast response

Junjiang Zhang

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253030
Event: Photonics China '96, 1996, Beijing, China

Abstract

A heterodyne interferometric system is presented. It is characterized by surface selectivity, high resolution and time saving measurement by using a short coherence length light source and a position sensitive detector. The tilt of a surface under test is converted into the deviation of a light spot from a fiducial point and measured by the position sensitive detector. With such a system an angular resolution of 0.1 second is obtainable.

Citation Download Citation

Junjiang Zhang "Heterodyne interferometry with surface selectivity and fast response", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253030

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