Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge

Victor F. Tarasenko; Mikhail I. Lomaev; Alexei N. Panchenko; Edward A. Sosnin

doi:10.1117/12.270096

31 March 1997 Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge

Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, Edward A. Sosnin

Proceedings Volume 2992, Excimer Lasers, Optics, and Applications; (1997) https://doi.org/10.1117/12.270096
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Design and operating parameters of powerful KrCl((lambda) approximately 222nm), XeCl((lambda) approximately 308nm) excilamps with different discharge geometry pumped by continuous glow discharges along with Ar₂((lambda) approximately 126nm) and Kr₂((lambda) approximately 146nm) excilamps pumped by barrier discharge are presented. Excilamps with high spatial uniformity of the output and gas lifetime up to 100 hours were developed. It was shown that efficiency of luminescence of exciplex molecules of about 30 percent can be obtained in high-voltage glow discharge and positive column of glow discharge. Output at (lambda) approximately 222nm up to 200 W from single excilamp and 500 W from three excilamps, operated in parallel, was demonstrated.

Citation Download Citation

Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, and Edward A. Sosnin "Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); https://doi.org/10.1117/12.270096

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