Organoaluminophosphate sol-gel silica glass thin films for integrated optics

Tahar Touam; Galina Milova; Z. Saddiki; M. Amir Fardad; Mark P. Andrews; Salim K. Juma; Jacek Chrostowski; S. Iraj Najafi

doi:10.1117/12.264135

23 January 1997 Organoaluminophosphate sol-gel silica glass thin films for integrated optics

Tahar Touam, Galina Milova, Z. Saddiki, M. Amir Fardad, Mark P. Andrews, Salim K. Juma, Jacek Chrostowski, S. Iraj Najafi

Author Affiliations +

Proceedings Volume 2997, Integrated Optics Devices: Potential for Commercialization; (1997) https://doi.org/10.1117/12.264135
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We report on the fabrication and characterization of waveguide thin films on silicon by ultraviolet light imprinting in a new photosensitive, organically modified aluminophosphate sol-gel silica glass prepared by a one-step dip-coating process. Appropriate combinations of ultraviolet light exposure time, sol-gel film thickness and postbake parameters produce waveguides suitable for optical telecommunication applications.

Citation Download Citation

Tahar Touam, Galina Milova, Z. Saddiki, M. Amir Fardad, Mark P. Andrews, Salim K. Juma, Jacek Chrostowski, and S. Iraj Najafi "Organoaluminophosphate sol-gel silica glass thin films for integrated optics", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); https://doi.org/10.1117/12.264135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available