Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask

Pin Long; Walter Daschner; Eric Johnson; Sing H. Lee

doi:10.1117/12.274406

15 May 1997 Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask

Pin Long, Walter Daschner, Eric Johnson, Sing H. Lee

Author Affiliations +

Proceedings Volume 3010, Diffractive and Holographic Device Technologies and Applications IV; (1997) https://doi.org/10.1117/12.274406
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Diffractive optical elements (DOEs) of the kinoform type have been fabricated on DuPont photopolymer by using a gray scale mask technology. The fabricated DOEs have high diffraction efficiency and low noise. Compared with the conventional DOE fabrication the new process is rather simple and does not involve expensive capital equipment such as mask aligners and dry etching systems, and can be extended to mass production.

Citation Download Citation

Pin Long, Walter Daschner, Eric Johnson, and Sing H. Lee "Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask", Proc. SPIE 3010, Diffractive and Holographic Device Technologies and Applications IV, (15 May 1997); https://doi.org/10.1117/12.274406

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