Wavefront control of optical components by laser-ablative figuring

Takahisa Jitsuno; Tomoyoshi Akashi; Masahiro Nakatsuka; Sadao Nakai; Keiu Tokumura

doi:10.1117/12.294329

8 December 1997 Wavefront control of optical components by laser-ablative figuring

Takahisa Jitsuno, Tomoyoshi Akashi, Masahiro Nakatsuka, Sadao Nakai, Keiu Tokumura

Proceedings Volume 3047, Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference; (1997) https://doi.org/10.1117/12.294329
Event: Second International Conference on Solid State Lasers for Application to ICF, 1996, Paris, France

Abstract

A new method for figuring the surface profile of optical plastics and optical glass have been proposed and demonstrated. An ArF excimer laser is used to ablate very thin layer of the surface of the substrates. The shape of the ablated surface is monitored by an interferometer in site condition. The ablation rate of PMMA is 0.08 micrometers per pulse at the energy density of 50 mJ/cm². The optical glass (BK-7) can be ablated 0.15 micrometers per pulse at the fluence of 1.5 J/cm².

Citation Download Citation

Takahisa Jitsuno, Tomoyoshi Akashi, Masahiro Nakatsuka, Sadao Nakai, and Keiu Tokumura "Wavefront control of optical components by laser-ablative figuring", Proc. SPIE 3047, Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference, (8 December 1997); https://doi.org/10.1117/12.294329

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