Interferometric testing of technical surfaces with computer-generated holograms

Sven Brinkmann; Roland Schreiner; Thomas Dresel; Johannes Schwider

doi:10.1117/12.281148

17 September 1997 Interferometric testing of technical surfaces with computer-generated holograms

Sven Brinkmann, Roland Schreiner, Thomas Dresel, Johannes Schwider

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281148
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Increasing demands for accuracy in manufacturing and international standards of quality control require faster and more precise measurement techniques. Surface inspection and shape control of technical workpieces is commonly done by tactile profilometers. A faster alternative to this mechanical tool can be realized interferometrically. Grazing incidence of laser light onto the technical surface reduces speckle-noise significantly. In our setup computer generated holograms are used both as references for the technical surfaces to be tested and as beam splitter or recombing element. Each class of workpieces requires specific computer generate holograms, e.g. phase-gratings for plane surfaces or diffractive axicons for cylindrical and conical surfaces An ideally shaped workpiece will result in a zero fringe field. Deviations from the ideal shape will be indicated by interference fringes and fringe distortions. The sensitivity of the interferometer can be adapted to technical needs. The surface deviations of the workpiece are superimposed by adjustment aberrations which can be described mathematically with sufficient accuracy and eliminated by a least square fit. We will demonstrate this measurement technique with workpieces of different shape.

Citation Download Citation

Sven Brinkmann, Roland Schreiner, Thomas Dresel, and Johannes Schwider "Interferometric testing of technical surfaces with computer-generated holograms", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available