Absolute interferometric calibration of toric and conical surfaces

Thomas Bluemel; Karl-Edmund Elssner; Guenter Schulz

doi:10.1117/12.295139

1 November 1997 Absolute interferometric calibration of toric and conical surfaces

Thomas Bluemel, Karl-Edmund Elssner, Guenter Schulz

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295139
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Prior to any interferometric surface shape testing, it is necessary to calibrate the interferometer in order to avoid systematic measurement errors. One common calibration method employs a standard specimen which has been previously calibrated by a so-called absolute testing method. Another method is the direct application of absolute testing methods to the interferometer. The authors have in the past developed and used absolute interferometric testing methods to calibrate flat, spherical and cylindrical surfaces, as well as complete interferometers. Now they have developed new methods, suitable also for toric and conical surfaces and the interferometers. The basic principles of the calibration methods are described. The correctness of the methods and the influence which measurement errors have on the results are demonstrated by computer simulation.

Citation Download Citation

Thomas Bluemel, Karl-Edmund Elssner, and Guenter Schulz "Absolute interferometric calibration of toric and conical surfaces", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295139

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