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The consequences of Ti implantation in silica glasses and Ta2O5 layer are studied. It is shown that the optical losses can be low with a variation of the refractive index which can be well controlled. Results on rectangular waveguides and Y junctions are given. Erbium implanted Ta2O5 layers exhibit a luminescent behavior both in the green and in the infra-red. The emission diagram of the coating can be controlled with a multilayer structure.
Francois Flory,Laurent Roux,Stephane Tisserand,Herve Rigneault,Stephanie Robert, andG. Mathieu
"Ion implantation in dielectric thin films for passive and active components", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300659
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Francois Flory, Laurent Roux, Stephane Tisserand, Herve Rigneault, Stephanie Robert, G. Mathieu, "Ion implantation in dielectric thin films for passive and active components," Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300659