Paper
16 April 1998 Structural modeling of amorphous conducting carbon film
Somnath Bhattacharyya, Swapan K. Pati, S. V. Subramanyam
Author Affiliations +
Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305621
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India
Abstract
Amorphous conducting carbon films are prepared using plasma assisted polymerization process. SEM and TEM shows random aggregate of globular clusters of micron size inside the samples. Electrical measurements indicate a near metallic nature. A tendency of saturation of resistivity at low temperature is observed. From spectroscopic analysis we find some unusual features. Based on these observations a structural model of this carbon is proposed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Somnath Bhattacharyya, Swapan K. Pati, and S. V. Subramanyam "Structural modeling of amorphous conducting carbon film", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305621
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KEYWORDS
Carbon

Chemical species

Transmission electron microscopy

Optical spheres

Spherical lenses

Scanning electron microscopy

Distortion

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