Optical properties of thin Al films studied by ordinary and polariton spectroellipsometry

Igor A. Shaikevich; Pavel V. Kolesnik; Victoria Pas'ko; Vasiliy V. Prorok

doi:10.1117/12.306232

20 April 1998 Optical properties of thin Al films studied by ordinary and polariton spectroellipsometry

Igor A. Shaikevich, Pavel V. Kolesnik, Victoria Pas'ko, Vasiliy V. Prorok

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306232
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

The new technique of measurements of the ellipsometric parameters and the optical constants of the thin metallic films with excitation of surface polaritons by Kretschman method is elaborated. It is shown that unlike the some authors' opinion both the excitation of the polaritons on the opposite to the illuminated side and the detection of the polaritons are possible for the film with thickness less than 30 nm.

Citation Download Citation

Igor A. Shaikevich, Pavel V. Kolesnik, Victoria Pas'ko, and Vasiliy V. Prorok "Optical properties of thin Al films studied by ordinary and polariton spectroellipsometry", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306232

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