Grating microinterferometer for local in-plane displacement/strain field analysis

Leszek A. Salbut; Malgorzata Kujawinska

doi:10.1117/12.323361

29 September 1998 Grating microinterferometer for local in-plane displacement/strain field analysis

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323361
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Micromechanical elements analysis require the local approach to their behavior and material constants. In the paper the automated grating microinterferometer GMI for in-plane displacement/strain measurement in a region smaller than 1 X 1 mm² is presented. It is based on the concept of achromatic grating interferometer combined with glass block waveguide and designed for the work with standard optical microscopes. The interferogram obtained may be modified and design for both temporal and carrier frequency phase shifting methods. The methodology of measurement is described and the example of GMI application is given.

Citation Download Citation

Leszek A. Salbut and Malgorzata Kujawinska "Grating microinterferometer for local in-plane displacement/strain field analysis", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323361

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available