Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)

Guenther K.G. Wernicke; Oliver Kruschke; Nazif Demoli; Hartmut Gruber

doi:10.1117/12.323339

29 September 1998 Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)

Guenther K.G. Wernicke, Oliver Kruschke, Nazif Demoli, Hartmut Gruber

Author Affiliations +

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323339
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Holographic microscopy with conjugate reconstruction for the interferometric determination of three-dimensional displacement was used for the investigation of the mechanical behavior of micromechanic and microelectronic components. An experimental set-up for the exposure of the holographic interferograms was used for the application of the spatial heterodyne technique, for the application of phase shifting, and for electro-optic holography. Three holograms for different illumination directions recorded on one holographic plate are reconstructed conjugately, and spatial heterodyne technique a well as phase shift technique were used to evaluate the interferograms. Only by conjugated reconstruction it is possible to obtain a perfectly optimized interferometer for the static evaluation method. The evaluation of interferograms which are strongly disturbed by speckle noise can be performed successfully. A comparison of the results of the application of both techniques is given. The influence of the speckle effect on the resolution was investigated.

Citation Download Citation

Guenther K.G. Wernicke, Oliver Kruschke, Nazif Demoli, and Hartmut Gruber "Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323339

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