Paper
1 June 1998 High-precision length measurement by means of multisensory laser-feedback interferometry
Thomas Allgeier, Heinrich A. Hoefler, Elmar E. Wagner
Author Affiliations +
Proceedings Volume 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1998) https://doi.org/10.1117/12.307686
Event: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 1998, Ancona, Italy
Abstract
We present a novel velocity and length measuring instrument based on laser-feedback interferometry. Uncertainties down to 10-4 in length measurement of moving materials can be achieved by combining the measurement signals of two separate sensors. Furthermore the dependence on parameters like the angle of incidence can be eliminated mathematically and no accurate alignment is required. The signal processing unit utilizes a real-time fast Fourier transformation. Thus good signal to noise ratios and very accurate measurements of most scattering surfaces used in industrial production are possible.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Allgeier, Heinrich A. Hoefler, and Elmar E. Wagner "High-precision length measurement by means of multisensory laser-feedback interferometry", Proc. SPIE 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (1 June 1998); https://doi.org/10.1117/12.307686
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Cited by 4 scholarly publications.
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KEYWORDS
Interferometers

Doppler effect

Signal processing

Sensors

Interferometry

Laser interferometry

Laser optics

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