Optocontact mini-displacement measurement instrument

Bo Liu; Ling Yang; Jian Zhang; Jian-Ying Fan

doi:10.1117/12.326629

8 October 1998 Optocontact mini-displacement measurement instrument

Bo Liu, Ling Yang, Jian Zhang, Jian-Ying Fan

Proceedings Volume 3415, Laser Diodes and Applications III; (1998) https://doi.org/10.1117/12.326629
Event: Lasers and Materials in Industry and Opto-Contact Workshop, 1998, Quebec, Canada

Abstract

The opto-contact mini-displacement measuring instrument is mainly for mini-displacement measurement. It not only can measure small geometry size, for example silicon chip thickness, but also can measure some other parameters such as small translation, waviness, diameter run-out, vibration. Combining optical, mechanical, electronic and computer technologies, this instrument can do some work automatically like dynamic sampling, real-time processing, on-line measuring. The instrument is based on laser triangulation, it is composed of a CCD, an optical system and a computer, which can sample and process data with high speed. The measuring principle is described as follows: reflected or scattered light by measured surface are received by CCD, since a good relationship between the offset of image point on CCD and the mini-displacement of object located on a reference plane, a mathematical model can be founded, then the mini-displacement may be calculated according to the offset of image point position on CCD. It's measuring range is +/- 500 micrometers , and precision resolution is +/- 0.1 micrometers .

Citation Download Citation

Bo Liu, Ling Yang, Jian Zhang, and Jian-Ying Fan "Optocontact mini-displacement measurement instrument", Proc. SPIE 3415, Laser Diodes and Applications III, (8 October 1998); https://doi.org/10.1117/12.326629

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