Fields associated with the solid immersion lens

Gordon S. Kino

doi:10.1117/12.326811

13 October 1998 Fields associated with the solid immersion lens

Gordon S. Kino

Proceedings Volume 3467, Far- and Near-Field Optics: Physics and Information Processing; (1998) https://doi.org/10.1117/12.326811
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The principles of operation of the solid immersion lens (SIL) are described. Two types of SIL, the hemisphere and super-sphere, and their tolerances, are discussed. Several application of the SIL to microscopy, lithography, and optical storage are reviewed, along with a description of the theoretical considerations for determining the spot size, the effect of the air gap, and the effect of multiple- layer structures on the ellipticity of the spot.

Citation Download Citation

Gordon S. Kino "Fields associated with the solid immersion lens", Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); https://doi.org/10.1117/12.326811

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