Silica-based rib waveguides for integrated optics using multimode interference

N. S. Lagali; R. Ian MacDonald; M. Reza Paiam; Kerstin Woerhoff; Alfred Driessen

doi:10.1117/12.328759

4 December 1998 Silica-based rib waveguides for integrated optics using multimode interference

N. S. Lagali, R. Ian MacDonald, M. Reza Paiam, Kerstin Woerhoff, Alfred Driessen

Proceedings Volume 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications; (1998) https://doi.org/10.1117/12.328759
Event: 1998 International Conference on Applications of Photonic Technology, 1998, Ottawa, Canada

Abstract

Integrated optical waveguides, as well as splitters and switches utilizing the principle of multimode interference have been realized in PECVD SiON/SiO₂ technology. The waveguide design has been optimized to meet a number of requirements, such as small device size, polarization- independent operation, and low-power active operation. The design, fabrication, and initial experimental results for these devices are discussed.

Citation Download Citation

N. S. Lagali, R. Ian MacDonald, M. Reza Paiam, Kerstin Woerhoff, and Alfred Driessen "Silica-based rib waveguides for integrated optics using multimode interference", Proc. SPIE 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications, (4 December 1998); https://doi.org/10.1117/12.328759

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