Real-time high-resolution absolute distance measurement by two-wavelength interferometry using superheterodyne detection

Toshiyuki Yokoyama; Tsutomu Araki; Shuko Yokoyama; Norihito Suzuki

doi:10.1117/12.321021

19 August 1998 Real-time high-resolution absolute distance measurement by two-wavelength interferometry using superheterodyne detection

Toshiyuki Yokoyama, Tsutomu Araki, Shuko Yokoyama, Norihito Suzuki

Author Affiliations +

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.321021
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

A new method of high-resolution two-wavelength interferometry was proposed for real-time and absolute measurement of micron-order distance or step-shapes in the depth. Simultaneous phase measurement of synthetic wavelength and one of two wavelengths was executed to measure the distance in the range of synthetic wavelength with interferometric resolution. A heterodyne light source constructed of two longitudinal modes was also proposed. The intermode beat of two modes was used as heterodyne career. Experiments were done with He-Ne lasers of 633 nm and 544/612 nm to measure 3 - 18 micrometers range.

Citation Download Citation

Toshiyuki Yokoyama, Tsutomu Araki, Shuko Yokoyama, and Norihito Suzuki "Real-time high-resolution absolute distance measurement by two-wavelength interferometry using superheterodyne detection", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.321021

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