Prospective MEMS applications at NEC

Kenichiro Suzuki

doi:10.1117/12.341199

10 March 1999 Prospective MEMS applications at NEC

Kenichiro Suzuki

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341199
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

This paper describes several silicon micromachined devices that have been developed at NEC from the viewpoint of commercial applications. The author learned it was difficult to continually succeed in business, even if the related technology could be established. It is supposed that the market for micromachined devices will soon become saturated, leading to strong cost competition and declining profitability. On the other hand, the potential wide applications for MEMS will allow many companies to develop their own specialties in the future.

Citation Download Citation

Kenichiro Suzuki "Prospective MEMS applications at NEC", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341199

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