Paper
6 September 1999 Large optics ion figuring
Roland Geyl, Andre Rinchet, Emmanuel Rolland
Author Affiliations +
Abstract
In 1994, REOSC took the decision to set up a large optics Ion figuring facility to be operational within 18 months. The equipment was designed to be able to accept components up to the maximum dimensions of 1.3 X 1.3 X 1.3 meters mounted in a high-vacuum chamber. After a period of design, fabrication, installation and validation, the Ion Beam Facility came is now, since more than two years, fully integrated in our production line as an efficient complementary technique to the mechanical polishing. We present in this paper some experimental results showing the maturity of the technology as well as some recent improvements and future applications.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roland Geyl, Andre Rinchet, and Emmanuel Rolland "Large optics ion figuring", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360141
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Ions

Ion beams

Mirrors

Polishing

Silicon carbide

Zerodur

Aspheric lenses

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