Measuring the absolute planarity of test plates with a modified Fritz's method

Vincenzo Greco; Giuseppe Molesini

doi:10.1117/12.360152

6 September 1999 Measuring the absolute planarity of test plates with a modified Fritz's method

Vincenzo Greco, Giuseppe Molesini

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360152
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

The Fritz's method using Zernike polynomials to assess the absolute planarity of test plates is revisited. Such method is based on four interferometric measurements, which are assumed perfectly correlated. In experiments, due to several instability sources, the data set is missing perfect correlation. Modifications of the Fritz's method are here presented, taking into account the residual uncorrelation of the data; such modified approach is demonstrated on a data set from experiments, achieving nanometer uncertainty level.

Citation Download Citation

Vincenzo Greco and Giuseppe Molesini "Measuring the absolute planarity of test plates with a modified Fritz's method", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360152

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