Practical measurement system for determination of refractive index and thickness using low-coherence interferometry

Hideki Maruyama; Shogo Inoue; Masato Ohmi; Keita Ihara; Shoji Nakagawa; Masamitsu Haruna

doi:10.1117/12.347811

7 May 1999 Practical measurement system for determination of refractive index and thickness using low-coherence interferometry

Hideki Maruyama, Shogo Inoue, Masato Ohmi, Keita Ihara, Shoji Nakagawa, Masamitsu Haruna

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347811
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

Very recently, we developed a computer-controlled low- coherence interferometer system with precise translation stages for simultaneous measurement of refractive index and thickness. Both phase and group indices can be determined automatically in a wide thickness range of 20 micrometer to a few mm. This paper presents the system configuration and the measurement principle accompanied with typical examples of automatic measurement.

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Hideki Maruyama, Shogo Inoue, Masato Ohmi, Keita Ihara, Shoji Nakagawa, and Masamitsu Haruna "Practical measurement system for determination of refractive index and thickness using low-coherence interferometry", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347811

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