Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask

Naoki Nishida; Yasuyuki Nishio; Hiroshi Kinoshita; Osamu Takaoka; Tomokazu Kozakai; Kazuo Aita

doi:10.1117/12.360253

25 August 1999 Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask

Naoki Nishida, Yasuyuki Nishio, Hiroshi Kinoshita, Osamu Takaoka, Tomokazu Kozakai, Kazuo Aita

Proceedings Volume 3748, Photomask and X-Ray Mask Technology VI; (1999) https://doi.org/10.1117/12.360253
Event: Photomask and X-Ray Mask Technology VI, 1999, Yokohama, Japan

Abstract

Focused-ion beam (FIB) repair technique is one of the important technologies for quality and productivity of attenuated phase shift mask (HT-PSM),especially for KrF lithography. Mainly, accurate and low damage technique are necessary for HT-PSM repair. Such requirements are satisfied with the improvement of gas-assisted etching (GAE) technique for FIB. New SIR-3000 made by Seiko Instruments has been developed for applying MoSi material etching. Using GAE technique, the transmittance evaluated from AIMS at repaired area was more than 99% (i-line), and 96 - 97% (KrF) without post process (Qz reference: 100%). The results indicate the focused-ion beam repair is applicable without post process to MoSi-based HT-PSM for KrF lithography. This paper report the characterization results of opaque defect repair on MoSi-based HT-PSM using new SIR-3000.

Citation Download Citation

Naoki Nishida, Yasuyuki Nishio, Hiroshi Kinoshita, Osamu Takaoka, Tomokazu Kozakai, and Kazuo Aita "Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask", Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); https://doi.org/10.1117/12.360253

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available