Measurement considerations for precise highly reflective surfaces using a phase-measuring Fizeau interferometer

Katherine Creath

doi:10.1117/12.355068

19 July 1999 Measurement considerations for precise highly reflective surfaces using a phase-measuring Fizeau interferometer

Katherine Creath

Author Affiliations +

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.355068
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

Stringent surface specifications for highly reflective precision optical surfaces place great demands on interferometric techniques used for surface metrology. Highly reflective test surfaces often produce nonsinusoidal interference fringes when compared to a partially- reflective/absorbing reference surface in Fizeau-type interferometers. This talk will discuss some tradeoffs in choosing phase-measurement techniques for use with noticeably nonsinusoidal fringes when the residual measurement error needs to be on the order of one-hundredth of a wave peak-to-valley. The errors due to the phase calculation algorithm, the phase shift calibration and the reference surface calibration are all coupled making the choices more difficult. Simulated data will be used for most of the discussion. Comparisons to the measurement of uncoated surfaces will be made.

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Katherine Creath "Measurement considerations for precise highly reflective surfaces using a phase-measuring Fizeau interferometer", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.355068

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