Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode

Yukihiro Ishii; Ribun Onodera; Takeshi Takahashi

doi:10.1117/12.354823

19 July 1999 Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode

Yukihiro Ishii, Ribun Onodera, Takeshi Takahashi

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354823
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

A phase-shifting interferometer with a tunable external- cavity laser diode for distance measurement has been constructed. The interference phase is shifted equally in four steps by varying the source wavelength. The distance is obtained by measuring the phase shift with Carre technique from four intensities. The experimental results shows a measurement range from 40 micrometers to 13 mm.

Citation Download Citation

Yukihiro Ishii, Ribun Onodera, and Takeshi Takahashi "Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354823

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